“AR-HPES study on chemical bonding states of high-κ/high-μ gate stacks for advanced CMOS”

H. Nohira, A. Komatsu, K. Yamashita, K. Kakushima, H. Iwai, K. Sawano, Y. Shiraki

Journal of Electron Spectroscopy and Related Phenomena 190, 295–301 (2013). DOI: https://doi.org/10.1016/j.elspec.2013.06.010(外部サイト)