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2013.06

2013.06.14 09:41

“AR-HPES study on chemical bonding states of high-κ/high-μ gate stacks for advanced CMOS”

H. Nohira, A. Komatsu, K. Yamashita, K. Kakushima, H. Iwai, K. Sawano, Y. ShirakiJournal of Electron Spectroscopy and Related Phenomena 190,...

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